http://www.veeco.com/ion-sources/index.aspx

Veeco is the world leader in ion beam technology, offering the most comprehensive ion source product line available. With technologies including DC, RF, Anode Layer, End-Hall and Cylindrical Magnetron. Veeco's technology advantage in ion beam grid optics has produced some of the world's most collimated and uniform ion beams for etch and alignment applications. In addition, Veeco has produced highly divergent ion sources for large area ion assisted deposition applications.